Kavli Nanoscience Institute
Resource / Instrument Live Usage Status
The following users are either checked into a room or currently have equipment in-use:
| Select | Status | Resource / Instrument | Time (h:mm)🛈 | Current User | Usage Type | Location |
|---|---|---|---|---|---|---|
|
Cleanroom | 865:40 655:26 313:38 285:57 222:36 196:13 191:56 146:24 49:13 |
Jose Gadea Frank Nilsen Jin Yu Liu Henk Postma Jarid Barajas Kailing Zhang Martin Thomaschewski Komron Shayegan Yifei Yan |
Occupancy Occupancy Occupancy Occupancy Occupancy Occupancy Occupancy Occupancy Occupancy |
Cleanroom | |
|
|
EBPG 5000 Plus | 0:23 | Eli Baum* | Appointment | Cleanroom | |
|
|
Nanoscribe | 309:07 | Hong Han | Appointment | Cleanroom | |
|
|
PECVD (Oxford) | 239:22 | Kelly McKenzie* | Appointment | Cleanroom | |
|
|
Wafer Bonder | 79:35 | Alex Wertheim* | Appointment | Cleanroom | |
|
|
AFM | Cleanroom | ||||
|
|
ALD-ALE | Cleanroom | ||||
|
|
Chal Sputter | Cleanroom | ||||
|
|
Crit Point Dryer | Cleanroom | ||||
|
Dielectric Etcher | Cleanroom | ||||
|
|
Dielectric Sputterer | Cleanroom | ||||
|
|
DRIE Etcher | Cleanroom | ||||
|
DWL | wet chem | ||||
|
|
E-beam Labline | Cleanroom | ||||
|
|
E-beam Orion | Cleanroom | ||||
|
|
EBPG 5200 | Cleanroom | ||||
|
|
Ellipsometer | Cleanroom | ||||
|
|
Etch Asher | Cleanroom | ||||
|
|
Filmetrics Scope | Cleanroom | ||||
|
|
Formlabs 3+ SLA | Cleanroom | ||||
|
|
Formlabs 3B+ SLA | Cleanroom | ||||
|
|
Headway Spinner | Cleanroom | ||||
|
|
III-V Etcher | Cleanroom | ||||
|
|
Keyence Microscope | Cleanroom | ||||
|
|
Laser Int Litho | Cleanroom | ||||
|
|
Laurel 1 | Cleanroom | ||||
|
|
Laurel 2 | Cleanroom | ||||
|
|
Laurel EBPG | Cleanroom | ||||
|
|
Leica Carbon Evap | Cleanroom | ||||
|
|
Microscopy Workstat | Cleanroom | ||||
|
|
NILT | Cleanroom | ||||
|
|
Nova 600 | Cleanroom | ||||
|
|
Orion NanoFab | Cleanroom | ||||
|
|
Parylene | Cleanroom | ||||
|
|
Profilometer | Cleanroom | ||||
|
|
Quanta ESEM | Cleanroom | ||||
|
|
RTP | Cleanroom | ||||
|
|
Scriber/Breaker | Cleanroom | ||||
|
|
Sirion FESEM | Cleanroom | ||||
|
|
Suss 1 Mask Aligner | Cleanroom | ||||
|
|
Suss 2 Mask Aligner | Cleanroom | ||||
|
|
TF-30 STEM | Cleanroom | ||||
|
|
Tube Furnace 1 | Cleanroom | ||||
|
|
Tube Furnace 2 | Cleanroom | ||||
|
|
Wafer Stepper | Cleanroom | ||||
|
|
Wet Chemistry | Cleanroom | ||||
|
|
Wire Bonder | Cleanroom | ||||
|
|
XeF2 Silicon Etcher | Cleanroom |