Kavli Nanoscience Institute
Resource / Instrument Live Usage as of Fri 8-14-2026 4:08 PM
The following users are currently either checked into a room or have equipment in use:
| Select | Status | Resource / Instrument | Time (h:mm)🛈 | Current User | Usage Type | Location |
|---|---|---|---|---|---|---|
|
Cleanroom | 91:59 4:19 1:50 1:18 0:29 0:24 0:02 |
Max Tepermeister Henk Postma Jiahui Li Li, Huijie Lillian Hughes Wyatt Mariya Talib Ezzy Litian Jia |
Scheduled Scheduled Scheduled Scheduled Scheduled Scheduled Scheduled |
Cleanroom | |
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|
Wet Chemistry (Wet Chem) | 340:54 185:28 49:35 23:51 |
Chuankun Zhang (chuankun) Yiting Wang Guy DeRose Tang-Yu Kao |
Scheduled Scheduled Scheduled Scheduled |
Cleanroom | |
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|
AFM | 1:34 | Lillian Hughes Wyatt | In-Use | Cleanroom | |
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ALD-ALE (Dep ALD-ALE) | 2:25 | Henk Postma | In-Use | Cleanroom | |
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EBPG 5000 Plus | 3:05 | Gloria Abu Halaka* | In-Use | Cleanroom | |
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Ellipsometer | 0:08 | Henk Postma | In-Use | Cleanroom | |
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Etcher III-V (Etch III-V) | 2:50 | Mariya Talib Ezzy | In-Use | Cleanroom | |
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Nanoscribe | 168:42 | Hong Han* | In-Use | Cleanroom | |
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Carbon Evap | Cleanroom | ||||
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Chal Sputterer (Dep Sputter Chal) | Cleanroom | ||||
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Crit Point Dryer | Cleanroom | ||||
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Dielectric Sputterer (Dep Sputter Diel) | Cleanroom | ||||
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E-beam Labline (Dep Ebeam Lesker) | Cleanroom | ||||
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E-beam Orion (Dep Ebeam AJA) | Cleanroom | ||||
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EBPG 5200 | Cleanroom | ||||
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Etcher Cobra (Etch Cobra) | Cleanroom | ||||
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Etcher Dielectric (Etch Dielectric) | Cleanroom | ||||
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Etcher DRIE (Etch DRIE) | Cleanroom | ||||
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Etcher XeF2 Silicon (Etch XeF2) | Cleanroom | ||||
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Filmetrics Scope (Filmetrics) | Cleanroom | ||||
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Formlabs 3+ SLA | Cleanroom | ||||
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Formlabs 3B+ SLA | Cleanroom | ||||
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Headway Spinner | Cleanroom | ||||
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Laser Int Litho | Cleanroom | ||||
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Laurell 1 | Cleanroom | ||||
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Laurell 2 | Cleanroom | ||||
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Laurell EBPG | Cleanroom | ||||
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NILT | Cleanroom | ||||
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Nova 600 | Cleanroom | ||||
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Optical Microscope (Keyence Scope) | Cleanroom | ||||
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Orion NanoFab (HIM FIB Orion) | Cleanroom | ||||
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Parylene | Cleanroom | ||||
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PECVD (Dep PECVD) | Cleanroom | ||||
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PECVD2 Oxide+Nitride (Dep PECVD2) | Cleanroom | ||||
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Plasma Asher | Cleanroom | ||||
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Profilom-Dektak | Cleanroom | ||||
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Profilom-Keyence | Cleanroom | ||||
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Quanta ESEM | Cleanroom | ||||
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RTP | Cleanroom | ||||
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Scriber/Breaker | Cleanroom | ||||
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Sirion FESEM | Cleanroom | ||||
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Suss 1 Mask Aligner (Mask Aligner 1) | Cleanroom | ||||
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Suss 2 Mask Aligner (Mask Aligner 2) | Cleanroom | ||||
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TPT Wire Bonder | Cleanroom | ||||
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Tube Furnace 1 | Cleanroom | ||||
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Tube Furnace 2 | Cleanroom | ||||
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Wafer Stepper | Cleanroom |