Kavli Nanoscience Institute
Resource / Instrument Live Usage as of Tue 9-29-2026 6:47 AM
The following users are currently either checked into a room or have equipment in use:
| Select | Status | Resource / Instrument | Time (h:mm)🛈 | Current User | Usage Type | Location |
|---|---|---|---|---|---|---|
|
Cleanroom | 89:41 17:55 |
Emma Codianne Yuting Zheng |
Scheduled Scheduled |
Cleanroom | |
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Wet Chemistry (Wet Chem) | 1435:33 981:43 444:49 233:25 183:37 112:06 64:30 |
Chuankun Zhang (chuankun) Jiri Kataman-Kustwan Eli Baum Xinyu (Harry) Liu Christian Kang Yi Zhang David Garrett |
Scheduled Scheduled Scheduled Scheduled Scheduled Scheduled Scheduled |
Cleanroom | |
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|
Nanoscribe | 139:25 | Hong Han* | In-Use | Cleanroom | |
|
Suss 2 Mask Aligner (Mask Aligner 2) | 16:00 | Nathan Lee* | In-Use | Cleanroom | |
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Tube Furnace 1 | 12:37 | Haojing Chen* | In-Use | Cleanroom | |
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AFM | Cleanroom | ||||
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ALD-ALE (Dep ALD-ALE) | Cleanroom | ||||
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Carbon Evap | Cleanroom | ||||
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Chal Sputterer (Dep Sputter Chal) | Cleanroom | ||||
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Crit Point Dryer | Cleanroom | ||||
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Dielectric Sputterer (Dep Sputter Diel) | Cleanroom | ||||
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E-beam Labline (Dep Ebeam Lesker) | Cleanroom | ||||
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E-beam Orion (Dep Ebeam AJA) | Cleanroom | ||||
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EBPG 5000 Plus | Cleanroom | ||||
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EBPG 5200 | Cleanroom | ||||
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Ellipsometer | Cleanroom | ||||
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Etcher Cobra (Etch Cobra) | Cleanroom | ||||
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Etcher Dielectric (Etch Dielectric) | Cleanroom | ||||
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Etcher DRIE (Etch DRIE) | Cleanroom | ||||
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Etcher III-V (Etch III-V) | Cleanroom | ||||
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Etcher XeF2 Silicon (Etch XeF2) | Cleanroom | ||||
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Filmetrics Scope (Filmetrics) | Cleanroom | ||||
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Formlabs 3+ SLA | Cleanroom | ||||
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Formlabs 3B+ SLA | Cleanroom | ||||
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Headway Spinner | Cleanroom | ||||
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Laser Int Litho | Cleanroom | ||||
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Laurell 1 | Cleanroom | ||||
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Laurell 2 | Cleanroom | ||||
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Laurell EBPG | Cleanroom | ||||
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NILT | Cleanroom | ||||
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Nova 600 | Cleanroom | ||||
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Optical Microscope (Keyence Scope) | Cleanroom | ||||
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Orion NanoFab (HIM FIB Orion) | Cleanroom | ||||
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Parylene | Cleanroom | ||||
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PECVD (Dep PECVD) | Cleanroom | ||||
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PECVD2 Oxide+Nitride (Dep PECVD2) | Cleanroom | ||||
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Plasma Asher | Cleanroom | ||||
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Profilom-Dektak | Cleanroom | ||||
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Profilom-Keyence | Cleanroom | ||||
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Quanta ESEM | Cleanroom | ||||
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RTP | Cleanroom | ||||
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Scriber/Breaker | Cleanroom | ||||
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Sirion FESEM | Cleanroom | ||||
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Suss 1 Mask Aligner (Mask Aligner 1) | Cleanroom | ||||
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TPT Wire Bonder | Cleanroom | ||||
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Tube Furnace 2 | Cleanroom | ||||
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Wafer Stepper | Cleanroom |