Kavli Nanoscience Institute
Resource / Instrument Live Usage as of Fri 6-26-2026 4:59 PM
The following users are currently either checked into a room or have equipment in use:
| Select | Status | Resource / Instrument | Time (h:mm)🛈 | Current User | Usage Type | Location |
|---|---|---|---|---|---|---|
|
Cleanroom | 7:04 6:42 4:18 2:08 0:15 |
Yifei Yan Mariya Talib Ezzy Justin Siu Jialun Zhu Kelly McKenzie |
Scheduled Scheduled Scheduled Scheduled Scheduled |
Cleanroom | |
|
|
Wet Chemistry (Wet Chem) | 6:08 3:35 |
Asher Medina Tang-Yu Kao |
Scheduled Scheduled |
Cleanroom | |
|
ALD-ALE (Dep ALD-ALE) | 72:52 | Kelly McKenzie | In-Use | Cleanroom | |
|
|
E-beam Orion (Dep Ebeam AJA) | 4:47 | Zehua Lu* | In-Use | Cleanroom | |
|
|
EBPG 5200 | 2:49 | William Chen* | In-Use | Cleanroom | |
|
|
Etcher Dielectric (Etch Dielectric) | 2:20 | Justin Siu | In-Use | Cleanroom | |
|
|
PECVD (Dep PECVD) | 243:01 | Kelly McKenzie | In-Use | Cleanroom | |
|
|
AFM | Cleanroom | ||||
|
|
Carbon Evap | Cleanroom | ||||
|
|
Chal Sputterer (Dep Sputter Chal) | Cleanroom | ||||
|
|
Crit Point Dryer | Cleanroom | ||||
|
|
Dielectric Sputterer (Dep Sputter Diel) | Cleanroom | ||||
|
|
DWL | Cleanroom | ||||
|
|
E-beam Labline (Dep Ebeam Lesker) | Cleanroom | ||||
|
|
EBPG 5000 Plus | Cleanroom | ||||
|
|
Ellipsometer | Cleanroom | ||||
|
|
Etcher Cobra (Etch Cobra) | Cleanroom | ||||
|
|
Etcher DRIE (Etch DRIE) | Cleanroom | ||||
|
|
Etcher III-V (Etch III-V) | Cleanroom | ||||
|
|
Etcher XeF2 Silicon (Etch XeF2) | Cleanroom | ||||
|
|
Filmetrics Scope (Filmetrics) | Cleanroom | ||||
|
|
Formlabs 3+ SLA | Cleanroom | ||||
|
|
Formlabs 3B+ SLA | Cleanroom | ||||
|
|
Headway Spinner | Cleanroom | ||||
|
|
Laser Int Litho | Cleanroom | ||||
|
|
Laurell 1 | Cleanroom | ||||
|
|
Laurell 2 | Cleanroom | ||||
|
|
Laurell EBPG | Cleanroom | ||||
|
|
Nanoscribe | Cleanroom | ||||
|
|
NILT | Cleanroom | ||||
|
|
Nova 600 | Cleanroom | ||||
|
|
Optical Microscope (Keyence Scope) | Cleanroom | ||||
|
|
Orion NanoFab (HIM FIB Orion) | Cleanroom | ||||
|
|
Parylene | Cleanroom | ||||
|
|
PECVD2 Oxide+Nitride (Dep PECVD2) | Cleanroom | ||||
|
|
Plasma Asher | Cleanroom | ||||
|
|
Profilom-Dektak | Cleanroom | ||||
|
|
Profilom-Keyence | Cleanroom | ||||
|
|
Quanta ESEM | Cleanroom | ||||
|
|
RTP | Cleanroom | ||||
|
|
Scriber/Breaker | Cleanroom | ||||
|
|
Sirion FESEM | Cleanroom | ||||
|
|
Suss 1 Mask Aligner (Mask Aligner 1) | Cleanroom | ||||
|
|
Suss 2 Mask Aligner (Mask Aligner 2) | Cleanroom | ||||
|
|
TF-30 STEM (TF-30) | Cleanroom | ||||
|
|
Tube Furnace 1 | Cleanroom | ||||
|
|
Tube Furnace 2 | Cleanroom | ||||
|
|
Wafer Stepper | Cleanroom | ||||
|
Wire Bonder | Cleanroom |