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Wet Chemistry (Wet Chem) |
216:33 |
Piero Chiappina |
Occupancy |
Cleanroom |
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Nanoscribe |
124:27 |
Hong Han* |
Appointment |
Cleanroom |
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PECVD (Oxford) (Dep PECVD) |
438:50 |
Kelly McKenzie* |
Appointment |
Cleanroom |
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AFM |
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Cleanroom |
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ALD-ALE (Dep ALD-ALE) |
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Cleanroom |
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Chal Sputter (Dep Sputter Chal) |
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Cleanroom |
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Cleanroom |
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Cleanroom |
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Crit Point Dryer |
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Cleanroom |
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Dielectric Etcher (Etch Dielectric) |
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Cleanroom |
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Dielectric Sputterer (Dep Sputter Diel) |
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Cleanroom |
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DRIE Etcher (Etch DRIE) |
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Cleanroom |
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E-beam Labline (Dep Ebeam Lesker) |
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Cleanroom |
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E-beam Orion (Dep Ebeam AJA) |
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Cleanroom |
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EBPG 5000 Plus |
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Cleanroom |
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EBPG 5200 |
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Cleanroom |
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Ellipsometer |
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Cleanroom |
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Etch Asher (Tergeo Asher) |
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Cleanroom |
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Filmetrics Scope (Filmetrics) |
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Cleanroom |
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Formlabs 3+ SLA |
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Cleanroom |
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Formlabs 3B+ SLA |
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Cleanroom |
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Headway Spinner |
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Cleanroom |
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III-V Etcher (Etch III-V) |
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Cleanroom |
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Keyence Microscope (Keyence Scope) |
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Cleanroom |
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Laser Int Litho |
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Cleanroom |
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Laurel 1 |
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Cleanroom |
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Laurel 2 |
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Cleanroom |
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Laurel EBPG |
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Cleanroom |
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Leica Carbon Evap (Leica) |
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Cleanroom |
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NILT |
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Cleanroom |
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Nova 600 |
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Cleanroom |
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Orion NanoFab (HIM FIB Orion) |
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Cleanroom |
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Parylene |
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Cleanroom |
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Profilometer |
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Cleanroom |
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Quanta ESEM (Quanta) |
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Cleanroom |
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RTP |
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Cleanroom |
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Scriber/Breaker |
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Cleanroom |
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Sirion FESEM (Sirion) |
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Cleanroom |
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Suss 1 Mask Aligner (Mask Aligner 1) |
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Cleanroom |
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Suss 2 Mask Aligner (Mask Aligner 2) |
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Cleanroom |
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TF-30 STEM (TF-30) |
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Cleanroom |
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Tube Furnace 1 |
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Cleanroom |
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Tube Furnace 2 |
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Cleanroom |
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Wafer Stepper |
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Cleanroom |
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Wire Bonder |
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Cleanroom |
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XeF2 Silicon Etcher (Etch XeF2) |
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Cleanroom |
Kavli Nanoscience Institute