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ALD-ALE (Dep ALD-ALE) |
62:16 |
Kelly McKenzie* |
Appointment |
Cleanroom |
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PECVD (Dep PECVD) |
232:25 |
Kelly McKenzie* |
Appointment |
Cleanroom |
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AFM |
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Cleanroom |
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Carbon Evap |
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Cleanroom |
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Chal Sputterer (Dep Sputter Chal) |
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Cleanroom |
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Cleanroom |
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Cleanroom |
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Crit Point Dryer |
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Cleanroom |
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Dielectric Sputterer (Dep Sputter Diel) |
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Cleanroom |
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DWL |
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Cleanroom |
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E-beam Labline (Dep Ebeam Lesker) |
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Cleanroom |
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E-beam Orion (Dep Ebeam AJA) |
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Cleanroom |
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EBPG 5000 Plus |
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Cleanroom |
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EBPG 5200 |
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Cleanroom |
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Ellipsometer |
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Cleanroom |
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Etcher Cobra (Etch Cobra) |
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Cleanroom |
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Etcher Dielectric (Etch Dielectric) |
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Cleanroom |
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Etcher DRIE (Etch DRIE) |
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Cleanroom |
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Etcher III-V (Etch III-V) |
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Cleanroom |
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Etcher XeF2 Silicon (Etch XeF2) |
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Cleanroom |
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Filmetrics Scope (Filmetrics) |
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Cleanroom |
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Formlabs 3+ SLA |
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Cleanroom |
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Formlabs 3B+ SLA |
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Cleanroom |
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Headway Spinner |
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Cleanroom |
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Laser Int Litho |
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Cleanroom |
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Laurell 1 |
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Cleanroom |
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Laurell 2 |
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Cleanroom |
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Laurell EBPG |
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Cleanroom |
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Nanoscribe |
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Cleanroom |
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NILT |
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Cleanroom |
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Nova 600 |
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Cleanroom |
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Optical Microscope (Keyence Scope) |
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Cleanroom |
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Orion NanoFab (HIM FIB Orion) |
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Cleanroom |
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Parylene |
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Cleanroom |
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PECVD2 Oxide+Nitride (Dep PECVD2) |
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Cleanroom |
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Plasma Asher |
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Cleanroom |
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Profilom-Dektak |
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Cleanroom |
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Profilom-Keyence |
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Cleanroom |
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Quanta ESEM |
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Cleanroom |
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RTP |
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Cleanroom |
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Scriber/Breaker |
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Cleanroom |
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Sirion FESEM |
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Cleanroom |
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Suss 1 Mask Aligner (Mask Aligner 1) |
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Cleanroom |
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Suss 2 Mask Aligner (Mask Aligner 2) |
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Cleanroom |
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TF-30 STEM (TF-30) |
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Cleanroom |
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Tube Furnace 1 |
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Cleanroom |
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Tube Furnace 2 |
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Cleanroom |
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Wafer Stepper |
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Cleanroom |
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Wet Chemistry (Wet Chem) |
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Cleanroom |
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Wire Bonder |
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Cleanroom |
Kavli Nanoscience Institute