|
|
Cleanroom |
0:53
0:51 |
Arun Nagpal
Yifei Yan |
Occupancy
Occupancy |
Cleanroom |
|
|
Wet Chemistry (Wet Chem) |
147:24
124:07 |
Guy DeRose
Mark Lohmann |
Occupancy
Occupancy |
Cleanroom |
|
|
AFM |
0:48 |
Yifei Yan |
Appointment |
Cleanroom |
|
|
EBPG 5000 Plus |
0:55 |
Arun Nagpal |
Appointment |
Cleanroom |
|
|
Orion NanoFab (HIM FIB Orion) |
99:46 |
Eli Baum* |
Appointment |
Cleanroom |
|
|
ALD-ALE (Dep ALD-ALE) |
|
|
|
Cleanroom |
|
|
Carbon Evap |
|
|
|
Cleanroom |
|
|
Chal Sputterer (Dep Sputter Chal) |
|
|
|
Cleanroom |
|
|
Crit Point Dryer |
|
|
|
Cleanroom |
|
|
Dielectric Sputterer (Dep Sputter Diel) |
|
|
|
Cleanroom |
|
|
DWL |
|
|
|
Cleanroom |
|
|
E-beam Labline (Dep Ebeam Lesker) |
|
|
|
Cleanroom |
|
|
E-beam Orion (Dep Ebeam AJA) |
|
|
|
Cleanroom |
|
|
EBPG 5200 |
|
|
|
Cleanroom |
|
|
Ellipsometer |
|
|
|
Cleanroom |
|
|
Etcher Dielectric (Etch Dielectric) |
|
|
|
Cleanroom |
|
|
Etcher DRIE (Etch DRIE) |
|
|
|
Cleanroom |
|
|
Etcher III-V (Etch III-V) |
|
|
|
Cleanroom |
|
|
Etcher XeF2 Silicon (Etch XeF2) |
|
|
|
Cleanroom |
|
|
Filmetrics Scope (Filmetrics) |
|
|
|
Cleanroom |
|
|
Formlabs 3+ SLA |
|
|
|
Cleanroom |
|
|
Formlabs 3B+ SLA |
|
|
|
Cleanroom |
|
|
Headway Spinner |
|
|
|
Cleanroom |
|
|
Laser Int Litho |
|
|
|
Cleanroom |
|
|
Laurell 1 |
|
|
|
Cleanroom |
|
|
Laurell 2 |
|
|
|
Cleanroom |
|
|
Laurell EBPG |
|
|
|
Cleanroom |
|
|
Nanoscribe |
|
|
|
Cleanroom |
|
|
NILT |
|
|
|
Cleanroom |
|
|
Nova 600 |
|
|
|
Cleanroom |
|
|
Optical Microscope (Keyence Scope) |
|
|
|
Cleanroom |
|
|
Parylene |
|
|
|
Cleanroom |
|
|
PECVD (Dep PECVD) |
|
|
|
Cleanroom |
|
|
PECVD2 Oxide+Nitride (Dep PECVD2) |
|
|
|
Cleanroom |
|
|
Plasma Asher |
|
|
|
Cleanroom |
|
|
Profilom-Dektak |
|
|
|
Cleanroom |
|
|
Profilom-Keyence |
|
|
|
Cleanroom |
|
|
Quanta ESEM |
|
|
|
Cleanroom |
|
|
RTP |
|
|
|
Cleanroom |
|
|
Scriber/Breaker |
|
|
|
Cleanroom |
|
|
Sirion FESEM |
|
|
|
Cleanroom |
|
|
Suss 1 Mask Aligner (Mask Aligner 1) |
|
|
|
Cleanroom |
|
|
Suss 2 Mask Aligner (Mask Aligner 2) |
|
|
|
Cleanroom |
|
|
T-Dep PECVD2 |
|
|
|
Cleanroom |
|
|
T-Ellipsometer |
|
|
|
Cleanroom |
|
|
T-Etcher Cobra (T-Etch Cobra) |
|
|
|
Cleanroom |
|
|
TF-30 STEM (TF-30) |
|
|
|
Cleanroom |
|
|
Tube Furnace 1 |
|
|
|
Cleanroom |
|
|
Tube Furnace 2 |
|
|
|
Cleanroom |
|
|
Wafer Stepper |
|
|
|
Cleanroom |
|
|
Wire Bonder |
|
|
|
Cleanroom |
Kavli Nanoscience Institute