Kavli Nanoscience Institute
Resource / Instrument Live Usage as of Monday, March 02, 2026 12:08 PM
The following users are currently either checked into a room or have equipment in use:
| Select | Status | Resource / Instrument | Time (h:mm)🛈 | Current User | Usage Type | Location |
|---|---|---|---|---|---|---|
|
Cleanroom | 2:17 1:27 1:22 -1:-01 -1:-02 |
Phillippe Pearson Jarid Barajas Yonghwi Kim (ykim3) Bilgehan Baspinar Lillian Hughes Wyatt |
Occupancy Occupancy Occupancy Occupancy Occupancy |
Cleanroom | |
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Wet Chemistry (Wet Chem) | 238:43 | Chengyi Luo | Occupancy | Cleanroom | |
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ALD-ALE (Dep ALD-ALE) | 1:21 | Lillian Hughes Wyatt | Appointment | Cleanroom | |
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EBPG 5200 | 3:53 | Christopher Freestone* | Appointment | Cleanroom | |
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Etcher DRIE (Etch DRIE) | 501:31 | Kelly McKenzie* | Appointment | Cleanroom | |
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Etcher III-V (Etch III-V) | 2:19 | Phillippe Pearson | Appointment | Cleanroom | |
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Orion NanoFab (HIM FIB Orion) | 68:32 | Eli Baum* | Appointment | Cleanroom | |
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Quanta ESEM | 0:26 | Yonghwi Kim (ykim3) | Appointment | Cleanroom | |
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Sirion FESEM | 0:23 | Yonghwi Kim (ykim3) | Appointment | Cleanroom | |
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AFM | Cleanroom | ||||
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Carbon Evap | Cleanroom | ||||
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Chal Sputterer (Dep Sputter Chal) | Cleanroom | ||||
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Crit Point Dryer | Cleanroom | ||||
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Dielectric Sputterer (Dep Sputter Diel) | Cleanroom | ||||
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E-beam Labline (Dep Ebeam Lesker) | Cleanroom | ||||
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E-beam Orion (Dep Ebeam AJA) | Cleanroom | ||||
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EBPG 5000 Plus | Cleanroom | ||||
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Ellipsometer | Cleanroom | ||||
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Etch Asher (Tergeo Asher) | Cleanroom | ||||
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Etcher Dielectric (Etch Dielectric) | Cleanroom | ||||
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Etcher XeF2 Silicon (Etch XeF2) | Cleanroom | ||||
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Filmetrics Scope (Filmetrics) | Cleanroom | ||||
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Formlabs 3+ SLA | Cleanroom | ||||
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Formlabs 3B+ SLA | Cleanroom | ||||
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Headway Spinner | Cleanroom | ||||
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Laser Int Litho | Cleanroom | ||||
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Laurell 1 | Cleanroom | ||||
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Laurell 2 | Cleanroom | ||||
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Laurell EBPG | Cleanroom | ||||
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Nanoscribe | Cleanroom | ||||
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NILT | Cleanroom | ||||
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Nova 600 | Cleanroom | ||||
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Optical Microscope (Keyence Scope) | Cleanroom | ||||
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Parylene | Cleanroom | ||||
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PECVD (Dep PECVD) | Cleanroom | ||||
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PECVD2 Oxide+Nitride (Dep PECVD2) | Cleanroom | ||||
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Profilom-Dektak | Cleanroom | ||||
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Profilom-Keyence | Cleanroom | ||||
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RTP | Cleanroom | ||||
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Scriber/Breaker | Cleanroom | ||||
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Suss 1 Mask Aligner (Mask Aligner 1) | Cleanroom | ||||
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Suss 2 Mask Aligner (Mask Aligner 2) | Cleanroom | ||||
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T-Dep PECVD2 | Cleanroom | ||||
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T-Ellipsometer | Cleanroom | ||||
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T-Etcher Cobra (T-Etch Cobra) | Cleanroom | ||||
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TF-30 STEM (TF-30) | Cleanroom | ||||
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Tube Furnace 1 | Cleanroom | ||||
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Tube Furnace 2 | Cleanroom | ||||
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Wafer Stepper | Cleanroom | ||||
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Wire Bonder | Cleanroom |