Kavli Nanoscience Institute
Resource / Instrument Live Usage as of Wednesday, July 30, 2025 9:10 AM
The following users are currently either checked into a room or have equipment in use:
| Select | Status | Resource / Instrument | Time (h:mm)🛈 | Current User | Usage Type | Location |
|---|---|---|---|---|---|---|
|
Cleanroom | 44:06 26:31 19:02 1:02 0:59 0:58 0:41 0:33 |
Yasir Sayyad Facilities, General (HVAC/Elec/Plumbing) Sydney Garstang Hwang, Emily (PINC) Samuel Seah Valles, Juanis Yang Jiao Jiayin Zhang |
Occupancy Occupancy Occupancy Occupancy Occupancy Occupancy Occupancy Occupancy |
Cleanroom | |
|
|
Wet Chemistry (Wet Chem) | 2853:58 478:49 189:08 18:49 |
Phillippe Pearson Yasir Sayyad Yifei Yan Nathan Lee |
Occupancy Occupancy Occupancy Occupancy |
Cleanroom | |
|
|
AFM | 0:44 | Samuel Seah | Appointment | Cleanroom | |
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ALD-ALE (Dep ALD-ALE) | 11:28 | Azmain Hossain (aahossai)* | Appointment | Cleanroom | |
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EBPG 5000 Plus | 0:06 | Jiayin Zhang | Appointment | Cleanroom | |
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EBPG 5200 | 1:35 | Christopher Freestone* | Appointment | Cleanroom | |
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Nanoscribe | 19:01 | Hong Han* | Appointment | Cleanroom | |
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PECVD (Oxford) (Dep PECVD) | 304:07 | Kelly McKenzie* | Appointment | Cleanroom | |
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Quanta ESEM (Quanta) | 0:51 | Valles, Juanis | Appointment | Cleanroom | |
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Chal Sputter (Dep Sputter Chal) | Cleanroom | ||||
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Crit Point Dryer | Cleanroom | ||||
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Dielectric Etcher (Etch Dielectric) | Cleanroom | ||||
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Dielectric Sputterer (Dep Sputter Diel) | Cleanroom | ||||
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DRIE Etcher (Etch DRIE) | Cleanroom | ||||
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E-beam Labline (Dep Ebeam Lesker) | Cleanroom | ||||
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E-beam Orion (Dep Ebeam AJA) | Cleanroom | ||||
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Ellipsometer | Cleanroom | ||||
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Etch Asher (Tergeo Asher) | Cleanroom | ||||
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Filmetrics Scope (Filmetrics) | Cleanroom | ||||
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Formlabs 3+ SLA | Cleanroom | ||||
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Formlabs 3B+ SLA | Cleanroom | ||||
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Headway Spinner | Cleanroom | ||||
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III-V Etcher (Etch III-V) | Cleanroom | ||||
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Keyence Microscope (Keyence Scope) | Cleanroom | ||||
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Laser Int Litho | Cleanroom | ||||
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Laurel 1 | Cleanroom | ||||
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Laurel 2 | Cleanroom | ||||
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Laurel EBPG | Cleanroom | ||||
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Leica Carbon Evap (Leica) | Cleanroom | ||||
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NILT | Cleanroom | ||||
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Nova 600 | Cleanroom | ||||
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Orion NanoFab (HIM FIB Orion) | Cleanroom | ||||
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Parylene | Cleanroom | ||||
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Profilometer | Cleanroom | ||||
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RTP | Cleanroom | ||||
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Scriber/Breaker | Cleanroom | ||||
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Sirion FESEM (Sirion) | Cleanroom | ||||
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Suss 1 Mask Aligner (Mask Aligner 1) | Cleanroom | ||||
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Suss 2 Mask Aligner (Mask Aligner 2) | Cleanroom | ||||
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TF-30 STEM (TF-30) | Cleanroom | ||||
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Tube Furnace 1 | Cleanroom | ||||
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Tube Furnace 2 | Cleanroom | ||||
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Wafer Stepper | Cleanroom | ||||
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Wire Bonder | Cleanroom | ||||
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XeF2 Silicon Etcher (Etch XeF2) | Cleanroom |