Kavli Nanoscience Institute

Resource / Instrument Live Usage as of Monday, January 05, 2026 2:00 PM

The following users are currently either checked into a room or have equipment in use:
Select Status Resource / Instrument Time (h:mm)🛈 Current User Usage Type Location
Cleanroom 0:41
0:05
Exion Huynh (Raith)
Phillippe Pearson
Occupancy
Occupancy
Cleanroom
Tube Furnace 1 2:37 David Catherall* Appointment Cleanroom
AFM Cleanroom
ALD-ALE (Dep ALD-ALE) Cleanroom
Carbon Evap Cleanroom
Chal Sputterer (Dep Sputter Chal) Cleanroom
Cobra Etcher (T-Dep PECVD2) Cleanroom
Crit Point Dryer Cleanroom
Dielectric Sputterer (Dep Sputter Diel) Cleanroom
E-beam Labline (Dep Ebeam Lesker) Cleanroom
E-beam Orion (Dep Ebeam AJA) Cleanroom
EBPG 5000 Plus Cleanroom
EBPG 5200 Cleanroom
Ellipsometer Cleanroom
Etch Asher (Tergeo Asher) Cleanroom
Etcher Dielectric (Etch Dielectric) Cleanroom
Etcher DRIE (Etch DRIE) Cleanroom
Etcher III-V (Etch III-V) Cleanroom
Etcher XeF2 Silicon (Etch XeF2) Cleanroom
Filmetrics Scope (Filmetrics) Cleanroom
Formlabs 3+ SLA Cleanroom
Formlabs 3B+ SLA Cleanroom
Headway Spinner Cleanroom
Laser Int Litho Cleanroom
Laurell 1 Cleanroom
Laurell 2 Cleanroom
Laurell EBPG Cleanroom
Nanoscribe Cleanroom
NILT Cleanroom
Nova 600 Cleanroom
Optical Microscope (Keyence Scope) Cleanroom
Orion NanoFab (HIM FIB Orion) Cleanroom
Parylene Cleanroom
PECVD (Dep PECVD) Cleanroom
PECVD Oxide+Nitride (Dep PECVD2) Cleanroom
Profilom-Dektak Cleanroom
Profilom-Keyence Cleanroom
Quanta ESEM Cleanroom
RTP Cleanroom
Scriber/Breaker Cleanroom
Sirion FESEM Cleanroom
Suss 1 Mask Aligner (Mask Aligner 1) Cleanroom
Suss 2 Mask Aligner (Mask Aligner 2) Cleanroom
TF-30 STEM (TF-30) Cleanroom
Tube Furnace 2 Cleanroom
Wafer Stepper Cleanroom
Wet Chemistry (Wet Chem) Cleanroom
Wire Bonder Cleanroom
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