Scheduled Resources

Kavli Nanoscience Institute

November 2025

Resources

Resource Status: Operational - AFM is Available!

AFM

AFM

Cleanroom

In Use

Resource Status: Operational - no issues found

ALD-ALE

ALD-ALE (Dep ALD-ALE)

Cleanroom

Available

Resource Status: Operational

Chal Sputterer

Chal Sputterer (Dep Sputter Chal)

Cleanroom

Available

Resource Status: Operational

Cobra Etcher

Cobra Etcher (T-Dep PECVD2)

Cleanroom

Available

Resource Status: Operational - Purge / Vent solenoid and needle valve replaced and adjusted.

Crit Point Dryer

Crit Point Dryer

Cleanroom

Available

Resource Status: Operational

Dielectric Sputterer

Dielectric Sputterer (Dep Sputter Diel)

Cleanroom

Available

Resource Status: Operational

E-beam Labline

E-beam Labline (Dep Ebeam Lesker)

Cleanroom

In Use

Resource Status: Operational - Alex fixed it

E-beam Orion

E-beam Orion (Dep Ebeam AJA)

Cleanroom

In Use

Resource Status: Operational - Raith has completed the recovery process, and the EBPG 5000+ is UP.

EBPG 5000 Plus

EBPG 5000 Plus

Cleanroom

In Use

Resource Status: Operational - Raith has vacuumed out particles from the cassette and tested both slots. The tool is up.

EBPG 5200

EBPG 5200

Cleanroom

In Use

Resource Status: Operational

Ellipsometer

Ellipsometer

Cleanroom

In Use

Resource Status: Operational - No issue with Cleanroom Particle Reading!

Etch Asher

Etch Asher (Tergeo Asher)

Cleanroom

Available

Resource Status: Out of Service - wafer transfer and lost 15v supply

Etcher Dielectric

Etcher Dielectric (Etch Dielectric)

Cleanroom

In Use

Resource Status: Operational - icp c2 motor replaced

Etcher DRIE

Etcher DRIE (Etch DRIE)

Cleanroom

In Use

Resource Status: Operational - done

Etcher III-V

Etcher III-V (Etch III-V)

Cleanroom

Available

Resource Status: Operational

Etcher XeF2 Silicon

Etcher XeF2 Silicon (Etch XeF2)

Cleanroom

Available

Resource Status: Operational

Filmetrics Scope

Filmetrics Scope (Filmetrics)

Cleanroom

Available

Resource Status: Operational

Formlabs 3+ SLA

Formlabs 3+ SLA

Cleanroom

Available

Resource Status: Operational

Formlabs 3B+ SLA

Formlabs 3B+ SLA

Cleanroom

Available

Resource Status: Operational

Headway Spinner

Headway Spinner

Cleanroom

In Use

Resource Status: Operational

Laser Int Litho

Laser Int Litho

Cleanroom

Available

Resource Status: Operational - Found the N2 supply line was disconnected under the spinner. Spinner working properly now.

Laurell 1

Laurell 1

Cleanroom

In Use

Resource Status: Operational

Laurell 2

Laurell 2

Cleanroom

Available

Resource Status: Operational

Laurell EBPG

Laurell EBPG

Cleanroom

Available

Resource Status: Operational - No issue with Cleanroom Particle Reading!

Leica Carbon Evap

Leica Carbon Evap (Leica)

Cleanroom

Available

Resource Status: Operational - SCU repaired (controls galvo scanner)

Nanoscribe

Nanoscribe

Cleanroom

In Use

Resource Status: Operational

NILT

NILT

Cleanroom

Available

Resource Status: Operational

Nova 600

Nova 600

Cleanroom

In Use

Resource Status: Operational

Optical Microscope

Optical Microscope (Keyence Scope)

B217 (Cleanroom)

Available

Resource Status: Operational - Rod Lubed and happy

Orion NanoFab

Orion NanoFab (HIM FIB Orion)

Cleanroom

In Use

Resource Status: Operational

Parylene

Parylene

Cleanroom

Available

Resource Status: Operational - turbo replaced

PECVD

PECVD (Dep PECVD)

Cleanroom

Available

Resource Status: Operational

Profilometer

Profilometer

Cleanroom

Available

Resource Status: Out of Service - Quanta is NOT Available

Quanta ESEM

Quanta ESEM

Cleanroom

Available

Resource Status: Out of Service - water flow solenoid isn

RTP

RTP

Cleanroom

Available

Resource Status: Operational

Scriber/Breaker

Scriber/Breaker

Cleanroom

In Use

Resource Status: Operational

Sirion FESEM

Sirion FESEM

Cleanroom

Available

Resource Status: Operational - UV lamp replaced and recalibrated

Suss 1 Mask Aligner

Suss 1 Mask Aligner (Mask Aligner 1)

Cleanroom

In Use

Resource Status: Operational - lamp replacement complete. light intensity calibration complete. intensity uniformity calibration complete.

Suss 2 Mask Aligner

Suss 2 Mask Aligner (Mask Aligner 2)

Cleanroom

Available

Resource Status: Operational

T-Etcher Cobra

T-Etcher Cobra (T-Etch Cobra)

Cleanroom

Available

Resource Status: Operational

TF-30 STEM

TF-30 STEM (TF-30)

Cleanroom

Available

Resource Status: Operational - chiller repaired

Tube Furnace 1

Tube Furnace 1

Cleanroom

Available

Resource Status: Operational - chiller repaired

Tube Furnace 2

Tube Furnace 2

Cleanroom

Available

Resource Status: Operational

Wafer Stepper

Wafer Stepper

Cleanroom

Available

Resource Status: Operational - New wedge tool installed

Wire Bonder

Wire Bonder

Cleanroom

In Use

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