Scheduled Resources

Kavli Nanoscience Institute

July 2026

Resources

Resource Status: Operational - Performed optics/stage recalibration.

AFM

AFM

Cleanroom

Available

Resource Status: Operational - fuse replaced

ALD-ALE

ALD-ALE (Dep ALD-ALE)

Cleanroom

In Use

Resource Status: Operational - No issue with Cleanroom Particle Reading!

Carbon Evap

Carbon Evap

Cleanroom

Available

Resource Status: Operational

Chal Sputterer

Chal Sputterer (Dep Sputter Chal)

Cleanroom

Available

Resource Status: Operational - Purge / Vent solenoid and needle valve replaced and adjusted.

Crit Point Dryer

Crit Point Dryer

Cleanroom

Available

Resource Status: Operational

Dielectric Sputterer

Dielectric Sputterer (Dep Sputter Diel)

Cleanroom

Available

Resource Status: Operational - tool ready

E-beam Labline

E-beam Labline (Dep Ebeam Lesker)

Cleanroom

Available

Resource Status: Out of Service - Beam shift needs adjustments

E-beam Orion

E-beam Orion (Dep Ebeam AJA)

Cleanroom

Available

Resource Status: Out of Service - The FEG has tripped this morning. Working on cause and solution, but the EBPG is down.

EBPG 5000 Plus

EBPG 5000 Plus

Cleanroom

In Use

Resource Status: Operational - The Lindgren MACS-D has been repaired, and the EBPG is UP.

EBPG 5200

EBPG 5200

Cleanroom

Available

Resource Status: Operational

Ellipsometer

Ellipsometer

Cleanroom

In Use

Resource Status: Operational

Etcher Cobra

Etcher Cobra (Etch Cobra)

Cleanroom

In Use

Resource Status: Operational - A communication jumper for the gate valve between LL and chamber was loose

Etcher Dielectric

Etcher Dielectric (Etch Dielectric)

Cleanroom

Available

Resource Status: Out of Service - icp cap 2 motor bad

Etcher DRIE

Etcher DRIE (Etch DRIE)

Cleanroom

In Use

Resource Status: Operational - done

Etcher III-V

Etcher III-V (Etch III-V)

Cleanroom

Available

Resource Status: Operational

Etcher XeF2 Silicon

Etcher XeF2 Silicon (Etch XeF2)

Cleanroom

Available

Resource Status: Operational

Filmetrics Scope

Filmetrics Scope (Filmetrics)

Cleanroom

Available

Resource Status: Operational

Formlabs 3+ SLA

Formlabs 3+ SLA

Cleanroom

Available

Resource Status: Operational

Formlabs 3B+ SLA

Formlabs 3B+ SLA

Cleanroom

Available

Resource Status: Operational

Headway Spinner

Headway Spinner

Cleanroom

Available

Resource Status: Operational

Laser Int Litho

Laser Int Litho

Cleanroom

Available

Resource Status: Operational - Found the N2 supply line was disconnected under the spinner. Spinner working properly now.

Laurell 1

Laurell 1

Cleanroom

Available

Resource Status: Operational

Laurell 2

Laurell 2

Cleanroom

Available

Resource Status: Operational

Laurell EBPG

Laurell EBPG

Cleanroom

Available

Resource Status: Operational - Laser repaired/replaced.

Nanoscribe

Nanoscribe

Cleanroom

In Use

Resource Status: Operational

NILT

NILT

Cleanroom

Available

Resource Status: Operational - Chiller service completed

Nova 600

Nova 600

Cleanroom

Available

Resource Status: Operational

Optical Microscope

Optical Microscope (Keyence Scope)

B217 (Cleanroom)

Available

Resource Status: Operational - System recovered with remote help from Zeiss

Orion NanoFab

Orion NanoFab (HIM FIB Orion)

Cleanroom

Available

Resource Status: Operational

Parylene

Parylene

Cleanroom

Available

Resource Status: Needs Attention - roots on rough pump needs servicing. pumping speed significantly decreased

PECVD

PECVD (Dep PECVD)

Cleanroom

In Use

Resource Status: Operational

PECVD2 Oxide+Nitride

PECVD2 Oxide+Nitride (Dep PECVD2)

Cleanroom

Available

Resource Status: Operational - No issue with Cleanroom Particle Reading!

Plasma Asher

Plasma Asher

Cleanroom

Available

Resource Status: Operational

Profilom-Dektak

Profilom-Dektak

Cleanroom

Available

Resource Status: Operational - The pre-requested trainings are nearly completed, and the tool is ready for general training sessions.

Profilom-Keyence

Profilom-Keyence

Cleanroom

Available

Resource Status: Operational - FEG has been run up and imaging looks good. Emission=306 uA

Quanta ESEM

Quanta ESEM

Cleanroom

Available

Resource Status: Operational

RTP

RTP

Cleanroom

Available

Resource Status: Operational

Scriber/Breaker

Scriber/Breaker

Cleanroom

Available

Resource Status: Operational

Sirion FESEM

Sirion FESEM

Cleanroom

Available

Resource Status: Operational - UV lamp replaced and recalibrated

Suss 1 Mask Aligner

Suss 1 Mask Aligner (Mask Aligner 1)

Cleanroom

Available

Resource Status: Operational - Lamp replacement and calibration completed.

Suss 2 Mask Aligner

Suss 2 Mask Aligner (Mask Aligner 2)

Cleanroom

Available

Resource Status: Operational

TF-30 STEM

TF-30 STEM (TF-30)

Cleanroom

Available

Resource Status: Needs Attention - Operational. Use with caution.

TPT Wire Bonder

TPT Wire Bonder

Cleanroom

Available

Resource Status: Operational - chiller repaired

Tube Furnace 1

Tube Furnace 1

Cleanroom

Available

Resource Status: Operational - chiller repaired

Tube Furnace 2

Tube Furnace 2

Cleanroom

Available

Resource Status: Operational

Wafer Stepper

Wafer Stepper

Cleanroom

Available

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