AFM
Cleanroom
In Use
ALD-ALE (Dep ALD-ALE)
Cleanroom
Available
Chal Sputter (Dep Sputter Chal)
Cleanroom
Available
Crit Point Dryer
Cleanroom
Available
Dielectric Etcher (Etch Dielectric)
Cleanroom
Available
Dielectric Sputterer (Dep Sputter Diel)
Cleanroom
Available
DRIE Etcher (Etch DRIE)
Cleanroom
Available
E-beam Labline (Dep Ebeam Lesker)
Cleanroom
In Use
E-beam Orion (Dep Ebeam AJA)
Cleanroom
In Use
EBPG 5000 Plus
Cleanroom
In Use
EBPG 5200
Cleanroom
In Use
Ellipsometer
Cleanroom
In Use
Etch Asher (Tergeo Asher)
Cleanroom
Available
Filmetrics Scope (Filmetrics)
Cleanroom
Available
Formlabs 3+ SLA
Cleanroom
Available
Formlabs 3B+ SLA
Cleanroom
Available
Headway Spinner
Cleanroom
Available
III-V Etcher (Etch III-V)
Cleanroom
Available
Keyence Microscope (Keyence Scope)
B217 (Cleanroom)
Available
Laser Int Litho
Cleanroom
Available
Laurel 1
Cleanroom
Available
Laurel 2
Cleanroom
Available
Laurel EBPG
Cleanroom
Available
Leica Carbon Evap (Leica)
Cleanroom
Available
Nanoscribe
Cleanroom
In Use
NILT
Cleanroom
Available
Nova 600
Cleanroom
In Use
Orion NanoFab (HIM FIB Orion)
Cleanroom
In Use
Parylene
Cleanroom
Available
PECVD (Oxford) (Dep PECVD)
Cleanroom
Available
Profilometer
Cleanroom
Available
Quanta ESEM (Quanta)
Cleanroom
Available
RTP
Cleanroom
Available
Scriber/Breaker
Cleanroom
In Use
Sirion FESEM (Sirion)
Cleanroom
Available
Suss 1 Mask Aligner (Mask Aligner 1)
Cleanroom
In Use
Suss 2 Mask Aligner (Mask Aligner 2)
Cleanroom
Available
TF-30 STEM (TF-30)
Cleanroom
Available
Tube Furnace 1
Cleanroom
Available
Tube Furnace 2
Cleanroom
Available
Wafer Stepper
Cleanroom
Available
Wire Bonder
Cleanroom
In Use
XeF2 Silicon Etcher (Etch XeF2)
Cleanroom
Available